Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization: Fid-Bau Portal

Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization

Kim, D. H. / Kim, Y. J. / Park, J. H. / Kim, J. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization

Kim, D. H. / Kim, Y. J. / Park, J. H. / Kim, J. H.

Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization

Kim, D. H. / Kim, Y. J. / Park, J. H. / Kim, J. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Preparation of TiN films by plasma assisted atomic layer deposition for copper metallization

Contributors:

Kim, D. H. (author) / Kim, Y. J. (author) / Park, J. H. (author) / Kim, J. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 24 ; 289-291

Publication date:

2004-01-01

Size:

3 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

Zhu, Y. / Dunn, K. A. / Kaloyeros, A. E. | British Library Online Contents | 2007

Atomic layer deposition of tantalum nitride for ultrathin liner applications in advanced copper metallization schemes

van der Straten, O. / Zhu, Y. / Dunn, K. et al. | British Library Online Contents | 2004

Preparation of tantalum oxide thin films by photo-assisted atomic layer deposition

Kwak, J. C. / Lee, Y. H. / Choi, B. H. | British Library Online Contents | 2004

Growth and characterization of aluminum oxide films by plasma-assisted atomic layer deposition

Jeong, C. W. / Lee, B. i. / Joo, S. K. | British Library Online Contents | 2001

Characteristics of copper films produced via atomic layer deposition

Huo, J. / Solanki, R. / McAndrew, J. | British Library Online Contents | 2002