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    Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemes

    New search for: Zhu, Y.
    New search for: Dunn, K. A.
    New search for: Kaloyeros, A. E.

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    Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemes

    New search for: Zhu, Y.
    New search for: Dunn, K. A.
    New search for: Kaloyeros, A. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemes

    New search for: Zhu, Y.
    New search for: Dunn, K. A.
    New search for: Kaloyeros, A. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Properties of ultrathin platinum deposited by atomic layer deposition for nanoscale copper-metallization schemes

    Contributors:

    Zhu, Y. (author) / Dunn, K. A. (author) / Kaloyeros, A. E. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 22 ; 1292-1298

    Publication date:

    2007-01-01

    Size:

    7 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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