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    High resolution deep level transient spectroscopy and process-induced defects in silicon

    New search for: Evans-Freeman, J. H.
    New search for: Emiroglu, D.
    New search for: Vernon-Parry, K. D.

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    High resolution deep level transient spectroscopy and process-induced defects in silicon

    New search for: Evans-Freeman, J. H.
    New search for: Emiroglu, D.
    New search for: Vernon-Parry, K. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High resolution deep level transient spectroscopy and process-induced defects in silicon

    New search for: Evans-Freeman, J. H.
    New search for: Emiroglu, D.
    New search for: Vernon-Parry, K. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    High resolution deep level transient spectroscopy and process-induced defects in silicon

    Contributors:

    Evans-Freeman, J. H. (author) / Emiroglu, D. (author) / Vernon-Parry, K. D. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 307-311

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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