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10 x 100 mm 4H-SiC Epitaxial Growth by Warm-Wall Planetary Reactor
10 x 100 mm 4H-SiC Epitaxial Growth by Warm-Wall Planetary Reactor
10 x 100 mm 4H-SiC Epitaxial Growth by Warm-Wall Planetary Reactor
Dong, L. (author) / Sun, G.S. (author) / Yu, J. (author) / Yan, G.G. (author) / Zhao, W.S. (author) / Wang, L. (author) / Zhang, X.H. (author) / Li, X.G. (author) / Wang, Z.G. (author) / Lebedev, A.A.
2013-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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