SiC Epitaxial Layer Growth in a 6x150 mm Warm-Wall Planetary Reactor: Fid-Bau Portal

SiC Epitaxial Layer Growth in a 6x150 mm Warm-Wall Planetary Reactor

Burk, A.A. / Tsvetkov, D. / Barnhardt, D. / O Loughlin, M.J. / Garrett, L. / Towner, P. / Seaman, J. / Deyneka, E. / Khlebnikov, Y. / Palmour, J.W.

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SiC Epitaxial Layer Growth in a 6x150 mm Warm-Wall Planetary Reactor

Burk, A.A. / Tsvetkov, D. / Barnhardt, D. / O Loughlin, M.J. / Garrett, L. / Towner, P. / Seaman, J. / Deyneka, E. / Khlebnikov, Y. / Palmour, J.W.

SiC Epitaxial Layer Growth in a 6x150 mm Warm-Wall Planetary Reactor

Burk, A.A. / Tsvetkov, D. / Barnhardt, D. / O Loughlin, M.J. / Garrett, L. / Towner, P. / Seaman, J. / Deyneka, E. / Khlebnikov, Y. / Palmour, J.W.

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Document information

Title:

SiC Epitaxial Layer Growth in a 6x150 mm Warm-Wall Planetary Reactor

Contributors:

Burk, A.A. (author) / Tsvetkov, D. (author) / Barnhardt, D. (author) / O Loughlin, M.J. (author) / Garrett, L. (author) / Towner, P. (author) / Seaman, J. (author) / Deyneka, E. (author) / Khlebnikov, Y. (author) / Palmour, J.W. (author)

Published in:

MATERIALS SCIENCE FORUM ; 717/720 ; 75-80

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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