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    Advanced activation of ultra-shallow junctions using flash-assisted RTP

    New search for: Lerch, W.
    New search for: Paul, S.
    New search for: Niess, J.
    New search for: McCoy, S.
    New search for: Selinger, T.
    New search for: Gelpey, J.
    New search for: Cristiano, F.
    New search for: Severac, F.
    New search for: Gavelle, M.
    New search for: Boninelli, S.

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    Advanced activation of ultra-shallow junctions using flash-assisted RTP

    New search for: Lerch, W.
    New search for: Paul, S.
    New search for: Niess, J.
    New search for: McCoy, S.
    New search for: Selinger, T.
    New search for: Gelpey, J.
    New search for: Cristiano, F.
    New search for: Severac, F.
    New search for: Gavelle, M.
    New search for: Boninelli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Advanced activation of ultra-shallow junctions using flash-assisted RTP

    New search for: Lerch, W.
    New search for: Paul, S.
    New search for: Niess, J.
    New search for: McCoy, S.
    New search for: Selinger, T.
    New search for: Gelpey, J.
    New search for: Cristiano, F.
    New search for: Severac, F.
    New search for: Gavelle, M.
    New search for: Boninelli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Advanced activation of ultra-shallow junctions using flash-assisted RTP

    Contributors:

    Lerch, W. (author) / Paul, S. (author) / Niess, J. (author) / McCoy, S. (author) / Selinger, T. (author) / Gelpey, J. (author) / Cristiano, F. (author) / Severac, F. (author) / Gavelle, M. (author) / Boninelli, S. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 24-31

    Publication date:

    2005-01-01

    Size:

    8 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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