Temperature-dependent carbon incorporation into the Si1-yCy film during gas-source molecular beam epitaxy using monomethylsilane: Fid-Bau Portal

Temperature-dependent carbon incorporation into the Si1-yCy film during gas-source molecular beam epitaxy using monomethylsilane

Konno, A. / Senthil, K. / Murata, T. / Suemitsu, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Temperature-dependent carbon incorporation into the Si1-yCy film during gas-source molecular beam epitaxy using monomethylsilane

Konno, A. / Senthil, K. / Murata, T. / Suemitsu, M.

Temperature-dependent carbon incorporation into the Si1-yCy film during gas-source molecular beam epitaxy using monomethylsilane

Konno, A. / Senthil, K. / Murata, T. / Suemitsu, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Temperature-dependent carbon incorporation into the Si1-yCy film during gas-source molecular beam epitaxy using monomethylsilane

Contributors:

Konno, A. (author) / Senthil, K. (author) / Murata, T. (author) / Suemitsu, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 3692-3696

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Sambonsuge, S. / Saito, E. / Jung, M.H. et al. | British Library Online Contents | 2013

Amorphous Silicon Carbide Film Formation at Room Temperature by Monomethylsilane Gas

Habuka, H. / Tsuji, M. / Ando, Y. | British Library Online Contents | 2013

Formation of High Quality SiC on Si(100) at 900^oC using Monomethylsilane Gas-Source MBE

Nakazawa, H. / Suemitsu, M. / Asami, S. | British Library Online Contents | 2000

In-situ control during molecular beam epitaxy: impurity incorporation and dissimilar materials epitaxial growth

Daweritz, L. / Wang, Z. M. / Schippan, F. et al. | British Library Online Contents | 2000

Heteroepitaxial growth of 3C-SiC film on Si(100) substrate by plasma chemical vapor deposition using monomethylsilane

Morikawa, Y. / Hirai, M. / Ohi, A. et al. | British Library Online Contents | 2007