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Strained Si engineering for nanoscale MOSFETs

Park, J. G. / Lee, G. S. / Kim, T. H. / Hong, S. H. / Kim, S. J. / Song, J. H. / Shim, T. H.

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Strained Si engineering for nanoscale MOSFETs

Park, J. G. / Lee, G. S. / Kim, T. H. / Hong, S. H. / Kim, S. J. / Song, J. H. / Shim, T. H.

Strained Si engineering for nanoscale MOSFETs

Park, J. G. / Lee, G. S. / Kim, T. H. / Hong, S. H. / Kim, S. J. / Song, J. H. / Shim, T. H.

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Check availability in my library

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Document information

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Document information

Title:

Strained Si engineering for nanoscale MOSFETs

Contributors:

Park, J. G. (author) / Lee, G. S. (author) / Kim, T. H. (author) / Hong, S. H. (author) / Kim, S. J. (author) / Song, J. H. (author) / Shim, T. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 134 ; 142-153

Publication date:

2006-01-01

Size:

12 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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