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Electron-beam-induced current imaging for the characterisation of structural defects in Si1-xGex films grown by LE-PECVD

Virtuani, A. / Marchionna, S. / Acciarri, M. / Isella, G. / von Kaenel, H.

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Electron-beam-induced current imaging for the characterisation of structural defects in Si1-xGex films grown by LE-PECVD

Virtuani, A. / Marchionna, S. / Acciarri, M. / Isella, G. / von Kaenel, H.

Electron-beam-induced current imaging for the characterisation of structural defects in Si1-xGex films grown by LE-PECVD

Virtuani, A. / Marchionna, S. / Acciarri, M. / Isella, G. / von Kaenel, H.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Electron-beam-induced current imaging for the characterisation of structural defects in Si1-xGex films grown by LE-PECVD

Contributors:

Virtuani, A. (author) / Marchionna, S. (author) / Acciarri, M. (author) / Isella, G. (author) / von Kaenel, H. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 798-801

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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