The impact of nitrogen co-implantation on boron ultra-shallow junction formation and underlying physical understanding: Fid-Bau Portal

The impact of nitrogen co-implantation on boron ultra-shallow junction formation and underlying physical understanding

Yeong, S. H. / Colombeau, B. / Mok, K. R. / Benistant, F. / Liu, C. J. / Wee, A. T. / Dong, G. / Chan, L. / Srinivasan, M. P.

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The impact of nitrogen co-implantation on boron ultra-shallow junction formation and underlying physical understanding

Yeong, S. H. / Colombeau, B. / Mok, K. R. / Benistant, F. / Liu, C. J. / Wee, A. T. / Dong, G. / Chan, L. / Srinivasan, M. P.

The impact of nitrogen co-implantation on boron ultra-shallow junction formation and underlying physical understanding

Yeong, S. H. / Colombeau, B. / Mok, K. R. / Benistant, F. / Liu, C. J. / Wee, A. T. / Dong, G. / Chan, L. / Srinivasan, M. P.

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Access via TIB

Check availability in my library

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Document information

Title:

The impact of nitrogen co-implantation on boron ultra-shallow junction formation and underlying physical understanding

Contributors:

Yeong, S. H. (author) / Colombeau, B. (author) / Mok, K. R. (author) / Benistant, F. (author) / Liu, C. J. (author) / Wee, A. T. (author) / Dong, G. (author) / Chan, L. (author) / Srinivasan, M. P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 43-48

Publication date:

2008-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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