Modelling of Boron Trapping at End-of-Range defects in pre-amorphized ultra-shallow junctions: Fid-Bau Portal

Modelling of Boron Trapping at End-of-Range defects in pre-amorphized ultra-shallow junctions

Bazizi, E. M. / Fazzini, P. F. / Zechner, C. / Tsibizov, A. / Kheyrandish, H. / Pakfar, A. / Ciampolini, L. / Tavernier, C. / Cristiano, F.

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Modelling of Boron Trapping at End-of-Range defects in pre-amorphized ultra-shallow junctions

Bazizi, E. M. / Fazzini, P. F. / Zechner, C. / Tsibizov, A. / Kheyrandish, H. / Pakfar, A. / Ciampolini, L. / Tavernier, C. / Cristiano, F.

Modelling of Boron Trapping at End-of-Range defects in pre-amorphized ultra-shallow junctions

Bazizi, E. M. / Fazzini, P. F. / Zechner, C. / Tsibizov, A. / Kheyrandish, H. / Pakfar, A. / Ciampolini, L. / Tavernier, C. / Cristiano, F.

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Title:

Modelling of Boron Trapping at End-of-Range defects in pre-amorphized ultra-shallow junctions

Contributors:

Bazizi, E. M. (author) / Fazzini, P. F. (author) / Zechner, C. (author) / Tsibizov, A. (author) / Kheyrandish, H. (author) / Pakfar, A. (author) / Ciampolini, L. (author) / Tavernier, C. (author) / Cristiano, F. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 275-278

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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