Thin PSG Process for 4H-SiC MOSFET: Fid-Bau Portal

Thin PSG Process for 4H-SiC MOSFET

Sharma, Y.K. / Ahyi, A.C. / Isaacs-Smith, T. / Modic, A. / Xu, Y. / Granfukel, E. / Jennings, M.R. / Fisher, C. / Thomas, S.M. / Mawby, P.A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Thin PSG Process for 4H-SiC MOSFET

Sharma, Y.K. / Ahyi, A.C. / Isaacs-Smith, T. / Modic, A. / Xu, Y. / Granfukel, E. / Jennings, M.R. / Fisher, C. / Thomas, S.M. / Mawby, P.A.

Thin PSG Process for 4H-SiC MOSFET

Sharma, Y.K. / Ahyi, A.C. / Isaacs-Smith, T. / Modic, A. / Xu, Y. / Granfukel, E. / Jennings, M.R. / Fisher, C. / Thomas, S.M. / Mawby, P.A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Thin PSG Process for 4H-SiC MOSFET

Contributors:

Sharma, Y.K. (author) / Ahyi, A.C. (author) / Isaacs-Smith, T. (author) / Modic, A. (author) / Xu, Y. (author) / Granfukel, E. (author) / Jennings, M.R. (author) / Fisher, C. (author) / Thomas, S.M. (author) / Mawby, P.A. (author)

Published in:

Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 513-516

MATERIALS SCIENCE FORUM ; 778/780

Publication date:

2014-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Blanc, C. / Tournier, D. / Godignon, P. et al. | British Library Online Contents | 2006

A two-step annealing process for Ni silicide formation in an ultra-thin body RF SOI MOSFET

Ahn, C. G. / Kim, T. Y. / Yang, J. H. et al. | British Library Online Contents | 2008

Oxidation Process by RTP for 4H-SiC MOSFET Gate Fabrication

Constant, A. / Camara, N. / Montserrat, J. et al. | British Library Online Contents | 2011

Thin-film SOI n-MOSFET low-frequency noise measurements at elevated temperatures

Dessard, V. / Eggermont, J. P. / Flandre, D. et al. | British Library Conference Proceedings | 1998

SiC MOSFET Reliability Update

Das, M.K. / Haney, S. / Richmond, J. et al. | British Library Online Contents | 2012