A platform for research: civil engineering, architecture and urbanism
Investigation of c-Si surface passivation using thermal ALD deposited HfO2 films
Investigation of c-Si surface passivation using thermal ALD deposited HfO2 films
Investigation of c-Si surface passivation using thermal ALD deposited HfO2 films
Gougam, Adel B. (author) / Rajab, Bilal (author) / Bin Afif, Abdulla (author)
Materials science in semiconductor processing ; 95 ; 42-47
2019-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Silicon surface passivation using thin HfO2 films by atomic layer deposition
British Library Online Contents | 2015
|British Library Online Contents | 2011
|Reliability assessment of ultra-thin HfO2 films deposited on silicon wafer
British Library Online Contents | 2012
|British Library Online Contents | 2015
|Trends of structural and electrical properties in atomic layer deposited HfO2 films
British Library Online Contents | 2004
|