A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
MAGNESIUM OXIDE SPUTTERING TARGET
A sputtering target configured from a magnesium oxide sintered body, wherein a ratio of crystal grains of the magnesium oxide sintered body in which a number of pinholes in a single crystal grain is 20 or more is 50% or less. The present invention is a sputtering target configured from a magnesium oxide sintered body in which the generation of particles during sputtering is less.
MAGNESIUM OXIDE SPUTTERING TARGET
A sputtering target configured from a magnesium oxide sintered body, wherein a ratio of crystal grains of the magnesium oxide sintered body in which a number of pinholes in a single crystal grain is 20 or more is 50% or less. The present invention is a sputtering target configured from a magnesium oxide sintered body in which the generation of particles during sputtering is less.
MAGNESIUM OXIDE SPUTTERING TARGET
MAGNESIUMOXIDSPUTTERTARGET
CIBLE DE PULVÉRISATION D'OXYDE DE MAGNÉSIUM
KAJITA HIROKI (author) / SHIBUYA YOSHITAKA (author) / NARITA SATOYASU (author)
2022-05-25
Patent
Electronic Resource
English
MAGNESIUM OXIDE SPUTTERING TARGET AND METHOD OF MAKING SAME
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MAGNESIUM OXIDE SPUTTERING TARGET AND METHOD OF MAKING SAME
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