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    SINTERED BODY, AND COMPONENT FOR SEMICONDUCTOR-MANUFACTURING APPARATUS

    New search for: IMAI MASAHITO
    New search for: ITO YASUTAKA

    To provide a sintered body of yttrium oxyfluoride excellent in impact resistance.SOLUTION: The sintered body comprises yttrium oxyfluoride. At least a surface of the sintered body has microcracks.SELECTED DRAWING: Figure 1

    【課題】耐衝撃性に優れたオキシフッ化イットリウムの焼結体を提供する。【解決手段】オキシフッ化イットリウムを含む焼結体であって、上記焼結体の少なくとも表面にマイクロクラックを有してなることを特徴とする焼結体。【選択図】図１

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    SINTERED BODY, AND COMPONENT FOR SEMICONDUCTOR-MANUFACTURING APPARATUS

    New search for: IMAI MASAHITO
    New search for: ITO YASUTAKA

    To provide a sintered body of yttrium oxyfluoride excellent in impact resistance.SOLUTION: The sintered body comprises yttrium oxyfluoride. At least a surface of the sintered body has microcracks.SELECTED DRAWING: Figure 1

    【課題】耐衝撃性に優れたオキシフッ化イットリウムの焼結体を提供する。【解決手段】オキシフッ化イットリウムを含む焼結体であって、上記焼結体の少なくとも表面にマイクロクラックを有してなることを特徴とする焼結体。【選択図】図１

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    SINTERED BODY, AND COMPONENT FOR SEMICONDUCTOR-MANUFACTURING APPARATUS

    New search for: IMAI MASAHITO
    New search for: ITO YASUTAKA

    To provide a sintered body of yttrium oxyfluoride excellent in impact resistance.SOLUTION: The sintered body comprises yttrium oxyfluoride. At least a surface of the sintered body has microcracks.SELECTED DRAWING: Figure 1

    【課題】耐衝撃性に優れたオキシフッ化イットリウムの焼結体を提供する。【解決手段】オキシフッ化イットリウムを含む焼結体であって、上記焼結体の少なくとも表面にマイクロクラックを有してなることを特徴とする焼結体。【選択図】図１

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    Title:

    SINTERED BODY, AND COMPONENT FOR SEMICONDUCTOR-MANUFACTURING APPARATUS

    Additional title:

    焼結体及び半導体製造装置用部材

    Contributors:

    IMAI MASAHITO (author) / ITO YASUTAKA (author)

    Publication date:

    2023-02-09

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    Japanese

    Classification:

    IPC:  C04B Kalk , LIME / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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